With the optimization and upgrading of the market environment and favorable national policies, the demand for integrated circuits in downstream industries such as new energy vehicles, smart driving, smart terminals and 5G has surged. As a typical high-precision industry, the manufacturing of integrated circuits has extremely strict requirements on the production environment and process. Among them, the construction of clean rooms is a key link in integrated circuit manufacturing and has a vital impact on the performance of the final product.

As one of the earliest engineering companies in my country specializing in the installation of electromechanical equipment in clean rooms, China Electronics System Engineering No. 4 Construction Co., Ltd. (hereinafter referred to as "China Electronics System Engineering No. 4") can provide design, procurement, project management, and construction for integrated circuit manufacturing companies. , facility management, clean room supporting product manufacturing and other integrated "turnkey" engineering services.

In 2021, in the project to build an integrated circuit workshop clean room for Beijing Jiedian Holdings Co., Ltd. (hereinafter referred to as "Beijing Jiedian"), China Electronics No. 4 Company chose to work with the company in order to meet the customer's high-precision and high-stability requirements for environmental monitoring. In cooperation with Vaisala, the industrial temperature and humidity transmitter HMT330, the intrinsically safe temperature and humidity transmitter HMT370EX, and the temperature and humidity transmitter HMT120 have been successfully applied in the clean room of the Beijing power plant. Since its application, the relevant instruments and transmitters have operated stably and measured accurately.

Every detail will show up to create a high-standard clean workshop

Operators must wear tightly sealed special protective clothing and shoe covers, go through a strict workshop disinfection process, and then pass through several independent and isolated workshop gates before they can enter the clean room of the integrated circuit factory with strict standards. Different from general industrial products, the important steps of integrated circuits from monocrystalline silicon wafer manufacturing to IC manufacturing to IC packaging must be completed in a clean room. Whether it is tiny dust and debris, or invisible ambient temperature and humidity, etc., they will have a significant impact on the manufacturing process.

"The manufacturing of integrated circuits has very high requirements on the production environment. It requires extremely accurate and stable measurement of parameters such as temperature and humidity to ensure a stable and reliable production environment." Zhang Qi, general manager of the Market Management Center of China Electronics No. 4 Company, said, "In 2020, as early as the bidding stage of the Beijing Jiedian Clean Room Project, we knew that Vaisala's related products could fully meet customers' demanding needs for temperature and humidity measurement. Therefore, we decided to use Vaisala products as measuring instruments for bidding , thus starting a series of in-depth cooperation with Vaisala.”

With the upgrade of my country's integrated circuit manufacturing process, the degree of cleanliness required in the manufacturing process has also increased, which has put forward increasingly higher requirements for the construction of clean rooms. According to reports, the integrated circuit technology manufactured by Beijing Electric Power Collection Institute has currently exceeded 28 nanometers, and the corresponding clean room ambient temperature error is ±0.3°C and the humidity error is ±3%. Once the temperature and humidity exceed the limit error, it will significantly affect the product yield, performance and reliability.

For the above application environment, Vaisala's various products such as HMT330, HMT120 and HMT370EX play an important role in it. Among them, HMT330 can achieve accurate measurement in harsh environments and demanding requirements, and can also be customized for different application environments to meet a variety of customer needs. HMT120 is a temperature and humidity transmitter specially built for clean rooms and other environments. The intelligent measurement probe can be replaced on site, making it easy to achieve measurement traceability.

It is worth mentioning the temperature and humidity transmitter HMT370EX with "intrinsically safe" function. Even in the event of misoperation or malfunction, this product will not cause accidents or equipment damage. To date, the product has received multiple intrinsic safety certifications. In addition to measuring relative humidity and temperature, HMT370EX also supports the output of other humidity parameters, such as dew point temperature, wet bulb temperature, absolute humidity, mixing ratio, water concentration, water mass fraction, water vapor pressure and enthalpy value.

“The measurement accuracy of Vaisala products not only fully meets the design standards of clean rooms, but also significantly compresses the range of standard errors: reducing it to one-third of the benchmark error, reaching ±1% for humidity and ±0.1° for temperature. C, fully guaranteeing the reliable operation of the clean room." Zhang Qi added, "Due to the overall accuracy and stability of the project, Vaisala's measuring instruments became the ideal choice for our project."

HMT330 in MAU system

Breaking down barriers and responding quickly across oceans

For high-precision engineering construction, the importance of timeliness is self-evident. The various products and materials required for the project often have strict supply cycles. The lack of a certain key material will directly affect the progress of the project. The ups and downs of the global epidemic have added a degree of uncertainty to the delivery time of products.

"International logistics needs to be booked in advance. Due to the impact of the epidemic, some scarce materials and products need to be booked six months or more in advance." Zhang Qi said, "However, the project cycle of Beijing Electric Power Collection is very tight, and high-quality measurement products are crucial to the completion of the project. It was of great significance, and we were very worried about whether Vaisala's products would arrive in time."

Follow the authority when things are urgent. Against the background of tight product supply, Vaisala and its agents actively cooperated. When they reached a preliminary purchase intention with China Power Company No. 4 and had not yet signed a formal purchase contract, they locked in the products required for the project in advance and fully coordinated internally. External resources are used to deliver products to customers as scheduled.

Temperature and humidity transmitter HMT370EX with "intrinsically safe" function

"The project of Beijing Power Collection has been completed on schedule, and all indicators have reached the expected level. Up to now, the equipment of the relevant projects has been operating stably, and customers have not reported any after-sales needs. The lack of after-sales needs is also a high recognition of the quality of our products." Tan Tan Zhang Qi was deeply moved by the cooperation process between the two parties, "For our project, Vaisala's colleagues overcame many difficulties and provided the greatest support. This enhanced the trust between us and moved us very much. This has laid a good foundation for subsequent cooperation.”

Every year, professional contracting such as clean room construction accounts for about 50% of the total project volume of China Power No. 4 Company. Especially in the construction of ultra-large-area clean rooms, ultra-clean clean rooms, ultra-high space clean rooms, and ultra-precision clean rooms, CLP IV Company has rich engineering experience and related engineering technologies.

At the same time, Vaisala has also won the favor and trust of CLP IV with its stable and reliable product performance, excellent products and quick response services. It is believed that in the near future, Vaisala will carry out more in-depth strategic cooperation with CLP IV to help the brands of both parties appear in the creation and application scenarios of more high-end products.

Temperature and humidity transmitter HMT120